• Modulation Effects on Organic Electronics 

      Chen, Hang (Georgia Institute of Technology, 2005-11-30)
      A high aspect ratio epoxy mask has been built with Taiyo PSR4000BN on chemical sensing array chip. Thickness up to 200 and #61549;m and aspect ratio up to 16:1 have been achieved with this material. It is demonstrated ...
    • Plasma Etching at IEN: An Overview of Equipment and Processes 

      Chen, Hang (Georgia Institute of Technology, 2013-09-10)
      Plasma etching has become one of the most important techniques in IC fabrication. It plays a critical role in creating geometries of extremely small size for highly integrated devices. Plasma etching techniques utilize ...