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dc.contributor.authorKirkland, Eric Alan
dc.date.accessioned2007-02-14T16:29:34Z
dc.date.available2007-02-14T16:29:34Z
dc.date.issued2002-10-29
dc.identifier.urihttp://hdl.handle.net/1853/13471
dc.format.extent434554 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen
dc.publisherGeorgia Institute of Technologyen
dc.subjectSustainabilityen
dc.subjectAuto-focusingen
dc.subjectMetrologyen
dc.subjectNano-CMM systemen
dc.subjectOptical devicesen
dc.titleA Nano Coordinate Machine for Optical Dimensional Metrologyen
dc.typePresentationen


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