Now showing items 1-2 of 2
Mass-Sensitive Biochemical Microsensors
(Georgia Institute of Technology, 2008-10-10)
A resonant microsensor platform based on disk-type microstructures vibrating in an in-plane resonance mode for chemical and biochemical sensing applications in gas and liquid environments is presented. Based on measured ...
Silicon-Based Resonant Microsensors
(Georgia Institute of Technology, 2008-10-21)
The presentation gives an introduction to resonant microsensors providing a frequency output signal. These sensors generally benefit from an excellent frequency resolution, which is ideally limited only by the length of ...