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    Plasma Etching: An Overview of Equipment and Processing at IEN 

    Thomas, Mikkel A. (Georgia Institute of Technology, 2020-05-28)
    Etching is one of the fundamental building blocks of microelectronic fabrication. Removing material through chemical or physical means is an essential skill found in most microelectronics laboratories. The Institute for ...

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    Author
    Thomas, Mikkel A. (1)
    Subject
    Etching (1)
    Fabrication (1)
    Nanotechnology (1)... View MoreDate Issued
    2020 (1)
    Has File(s)
    Yes (1)
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