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Focused Electron Beam Induced Deposition (FEBID) - A New Tool for 3-D Nanomanufacturing
(Georgia Institute of Technology, 2011-01-25)
In FEBID a tightly-focused, high-energy electron beam impinges on a substrate and, upon collision interactions, producing lower energy back-scattered (BSE) primary electrons and secondary electrons (SE). Concurrently, the ...