Now showing items 1-2 of 2
(Georgia Institute of Technology, 2015-12-08)
The presentation discusses resonant MEMS and, in particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a microstructure, such as its resonance frequency or quality ...
Silicon-Based Resonant Microsensors
(Georgia Institute of Technology, 2008-10-21)
The presentation gives an introduction to resonant microsensors providing a frequency output signal. These sensors generally benefit from an excellent frequency resolution, which is ideally limited only by the length of ...