The Creation of a Viable Porous Silicon Gas Sensor
Lewis, Stephen Edward
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This dissertation describes the fabrication and operation of porous silicon gas sensors. The first chapter describes the motivation behind gas sensor research and provides the reader with background knowledge of gas sensors including the terminology and a review of various gas sensors. The following two chapters describe both how the porous silicon gas sensors are created and how they have been tested in the laboratory. Chapter 4 describes the steps required to create arrays of gas sensors to provide for a selective device through the application of patented selective coatings. Chapter 5 proposes a physical model that leads to a numerical solution for predicting the operation of the gas sensor. The next chapter builds from this model to analyze and optimize the experimental methods that are used to test both this and other gas sensors. The final chapter of this dissertation describes the prototype gas sensor system that has most recently been created, the company that was formed to further the development of that system, and the future applications of the porous silicon gas sensor.