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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Robust micromachined capacitive pressure sensors for mechanically harsh environments
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chang_sung_p_200208_phd_638832.pdf (19.67Mb)
Date
2002-08
Author
Chang, Sung Pil
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URI
http://hdl.handle.net/1853/15473
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Georgia Tech Theses and Dissertations
[23878]
School of Electrical and Computer Engineering Theses and Dissertations
[3381]
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