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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Simulation of a cylindrical CVD reactor for deposition of silicon carbide
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ludden_john_m_199212_ms_364076.pdf (11.06Mb)
Date
1992-12
Author
Ludden, John Michael
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URI
http://hdl.handle.net/1853/15879
Collections
Georgia Tech Theses and Dissertations
[23877]
School of Mechanical Engineering Theses and Dissertations
[4086]
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