Simulation of a cylindrical CVD reactor for deposition of silicon carbide

View/Open

ludden_john_m_199212_ms_364076.pdf (11.06Mb)

Date

1992-12

Author

Ludden, John Michael

Metadata

Show full item record

URI

http://hdl.handle.net/1853/15879

Collections

Georgia Tech Theses and Dissertations [21023]
School of Mechanical Engineering Theses and Dissertations [3618]