Simulation of a cylindrical CVD reactor for deposition of silicon carbide

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ludden_john_m_199212_ms_364076.pdf (11.06Mb)

Date

1992-12

Author

Ludden, John Michael

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URI

http://hdl.handle.net/1853/15879

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Georgia Tech Theses and Dissertations [20838]
School of Mechanical Engineering Theses and Dissertations [3593]