Wear model for chemo-mechanical polishing of single crystal silicon

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Please use this identifier to cite or link to this item: http://hdl.handle.net/1853/15984

Title: Wear model for chemo-mechanical polishing of single crystal silicon
Author: Mess, Francis McCarthy
Type: Thesis
URI: http://hdl.handle.net/1853/15984
Date: 1997-05
Publisher: Georgia Institute of Technology
Subject: Silicon
Grinding and polishing
Department: Mechanical engineering
Advisor: Steven Danyluk
Degree: M.S.

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