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dc.contributor.authorByun, Albert Joonsooen_US
dc.date.accessioned2007-08-16T17:58:31Z
dc.date.available2007-08-16T17:58:31Z
dc.date.issued2007-05-31en_US
dc.identifier.urihttp://hdl.handle.net/1853/16296
dc.description.abstractThe detection of volatile organic compounds in liquid is of interest for applications in public health, workplace safety and environmental monitoring. Traditionally, water samples were taken and analyzed in the laboratory using classical laboratory instrumentation. Current trends target real-time measurements using e.g. chemical microsensors built with microfabrication technologies. Among these, mass-sensitive chemical sensors, based on cantilever beams or surface acoustic devices, have shown substantial promise in gas-phase applications. In a liquid environment, the resonant microstructures typically suffer from high damping, which negatively affects the sensor resolution. In this work, a novel disk-type resonator developed at Georgia Tech was investigated as chemical microsensor for liquid-phase applications. The micromachined resonator vibrates in a rotational in-plane mode shape, reducing damping in a liquid environment. As part of the present research, a measurement setup with a custom-made flow cell for liquid-phase chemical measurements and a coating system to locally deposit polymer sensitive films onto the resonators were developed. To improve the film adhesion on the resonator surface in liquid, physical and chemical binding techniques were developed and tested on wafer samples. Polymers such as poly(4-vinylpyrrolidone), poly(ethylene-co-propylene) and poly(styrene-co-butadiene) were deposited using the custom-designed coating system onto the disk-type resonators. Liquid-phase measurements using tetrachloroethylene as the chemical analyte were performed. The experimental results are discussed, sources of problems are identified and recommendations for future research are made.en_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectChemical sensorsen_US
dc.subjectMEMSen_US
dc.subjectMass-sensitiveen_US
dc.subjectResonatoren_US
dc.subjectLiquid measurementen_US
dc.subjectPolymer coatingen_US
dc.subjectFlow cellen_US
dc.subjectDisk-type resonatoren_US
dc.titleChemical Application of Silicon-Based Resonant Microsensoren_US
dc.typeThesisen_US
dc.description.degreeM.S.en_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
dc.description.advisorCommittee Chair: Oliver, Brand; Committee Member: Frazier, Bruno; Committee Member: Mizaikoff, Borisen_US


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