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dc.contributor.authorKirkland, Eric Alanen_US
dc.date.accessioned2007-09-14T11:30:38Z
dc.date.available2007-09-14T11:30:38Z
dc.date.issued2003-05en_US
dc.identifier.urihttp://hdl.handle.net/1853/16525
dc.publisherGeorgia Institute of Technologyen_US
dc.rightsAccess restricted to authorized Georgia Tech users only.en_US
dc.subject.lcshCoordinate measuring machines Designen_US
dc.subject.lcshMiniature electronic equipment Measurementen_US
dc.subject.lcshDVDsen_US
dc.titleA nano coordinate machine for optical dimensional metrologyen_US
dc.typeThesisen_US
dc.description.degreeM.S.en_US
dc.contributor.departmentMechanical engineeringen_US
dc.description.advisorSteven Y. Liangen_US
dc.identifier.bibid671508en_US


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