Analysis of the residual stresses in silicon wafers using shadow Moiré technique

View/Open

vrinceanu_isabela_d_200208_phd_662234.pdf (18.19Mb)

Date

2002-08

Author

Vrinceanu, Isabela D.

Metadata

Show full item record

URI

http://hdl.handle.net/1853/17320

Collections

Georgia Tech Theses and Dissertations [21261]
School of Mechanical Engineering Theses and Dissertations [3653]