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    Analysis of the residual stresses in silicon wafers using shadow Moiré technique

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    vrinceanu_isabela_d_200208_phd_662234.pdf (18.19Mb)
    Date
    2002-08
    Author
    Vrinceanu, Isabela D.
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    URI
    http://hdl.handle.net/1853/17320
    Collections
    • Georgia Tech Theses and Dissertations [22398]
    • School of Mechanical Engineering Theses and Dissertations [3831]

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