Water jet cutting of silicon : kerf width prediction

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sucosky_philippe_200005_ms_504915.pdf (13.78Mb)

Date

2000-05

Author

Sucosky, Philippe

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URI

http://hdl.handle.net/1853/17511

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Georgia Tech Theses and Dissertations [23654]
School of Mechanical Engineering Theses and Dissertations [4050]