Water jet cutting of silicon : kerf width prediction

View/Open

sucosky_philippe_200005_ms_504915.pdf (13.78Mb)

Date

2000-05

Author

Sucosky, Philippe

Metadata

Show full item record

URI

http://hdl.handle.net/1853/17511

Collections

Georgia Tech Theses and Dissertations [22684]
School of Mechanical Engineering Theses and Dissertations [3881]