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dc.contributor.authorLee, Jung Chulen_US
dc.date.accessioned2008-06-10T20:46:30Z
dc.date.available2008-06-10T20:46:30Z
dc.date.issued2007-04-05en_US
dc.identifier.urihttp://hdl.handle.net/1853/22697
dc.description.abstractThermal, electrical, and mechanical characteristics of heated cantilevers were experimentally studied in various conditions. Experiments investigated thermal, mechanical, and coupled behaviors of the heated cantilevers under DC, AC, and transient electrical heating. Raman spectroscopy measured local temperature and qualitative intrinsic stress with high spatial resolution. Based on the thorough understanding from device characterization, cantilever type micro hotplates and small array of heated cantilevers with integrated piezoresistive sensors were fabricated and characterized. Well characterized cantilever sensors were applied to heat transfer study and microfludic research. Heated microcantilevers were suggested to study sub-continuum heat transfer from a micro heater to ambient gas environment in a wide range of pressure. Microcantilever sensors were employed to study the free microjets emanated from microfabricated nozzles. Piezoresistive cantilevers measured jet thrust, velocity, and break-up distance of the liquid microjets and heated cantilevers investigated heat transfer characteristics and phase change phenomena during the microjet impingement.en_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectMicrocantileversen_US
dc.subjectSensorsen_US
dc.subjectPiezoresistorsen_US
dc.subjectHeatersen_US
dc.subjectMicrojeten_US
dc.subjectArrayen_US
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshHeat exchangers
dc.subject.lcshMetrology
dc.subject.lcshDetectors
dc.titleFabrication, characterization, and application of multifunctional microcantilever heatersen_US
dc.typeDissertationen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentMechanical Engineeringen_US
dc.description.advisorCommittee Chair: King, William; Committee Member: Allen, Mark; Committee Member: Brand, Oliver; Committee Member: Glezer, Ari; Committee Member: Joshi, Yogendraen_US


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