Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers
Goericke, Fabian Thomas
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Piezoresistive microcantilevers can be used for the detection of biological and chemical substances by measuring the change in surface stress. Design parameters for the cantilever and piezoresistor dimensions are investigated analytically and through finite element modelling. Based on these results, six optimized cantilever types are designed and fabricated with microfabrication methods. The electrical and mechanical properties of these devices as well as their deflection and surface stress sensitivities are characterized and compared to the models. A second generation of cantilevers that incorporates heater areas to trigger or enhance chemical reactions is designed and fabricated. In addition to the measurements done for the first generation devices, the thermal properties for both steady-state and transient operation of these microcantilevers are characterized.