Implementation of Rapid Thermal Processing to Achieve Greater Than 15% Efficient Screen-Printed Ribbon Silicon Solar Cells

Abstract

This paper summarizes our progress in fabricating record-high efficiency ribbon Si solar cells with screen-printed and photolithography defined contacts. We have developed and optimized rapid thermal processing enhanced SiN(x)-induced hydrogenation to achieve record-high efficiency screen-printed EFG (15.9%) and String Ribbon (15.6%) cells and a high-efficiency String Ribbon cell (17.8%) with photolithography defined contacts. A low-frequency SiN(x) film and a two-step RTP firing process were critical in achieving high-efficiency screenprinted cells. Step 1 provides SiN(x) induced hydrogenation and forms an aluminum doped back surface field. Step 2 is designed for Ag grid firing and includes rapid cooling to retain hydrogen introduced in Step 1.