Silicon-Based Resonant Microsensors

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dc.contributor.author Brand, Oliver
dc.date.accessioned 2009-01-06T20:29:31Z
dc.date.available 2009-01-06T20:29:31Z
dc.date.issued 2008-10-21
dc.identifier.uri http://hdl.handle.net/1853/26276
dc.description Oliver Brand Associate Professor in the School of Electrical and Computer Engineering presented a lecture at the Nano@Tech Meeting on October 21, 2008 at 12:00 noon in room 102 of the Microelectronics Research Center. en
dc.description Runtime: 58:15 minutes
dc.description.abstract The presentation gives an introduction to resonant microsensors providing a frequency output signal. These sensors generally benefit from an excellent frequency resolution, which is ideally limited only by the length of the counting period and the short-term frequency stability of the microstructure's resonance frequency. Device-level and system-level approaches to generate a measurand-dependent frequency signal are discussed and concepts to improve Q-factor, short-term frequency stability and ultimately sensor resolution are highlighted. Furthermore, the presentation discusses frequency drift challenges and introduces methods for drift compensation. The above concepts and approaches are illustrated using two resonant microsensor examples: (i) a mass-sensitive microsensor platform for gas- and liquid-phase chemical sensing based on disktype silicon microstructures and (ii) a cantilever-based resonant magnetic microsensor with a resolution suitable for Earth field applications. en
dc.format.extent 58:15 minutes
dc.language.iso en_US en
dc.publisher Georgia Institute of Technology en
dc.subject Nanotechnology en
dc.subject Sensor
dc.subject MEMS
dc.title Silicon-Based Resonant Microsensors en
dc.type Lecture en
dc.type Video
dc.contributor.corporatename Georgia Institute of Technology. School of Electrical and Computer Engineering


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