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dc.contributor.authorBrand, Oliver
dc.date.accessioned2009-01-06T20:29:31Z
dc.date.available2009-01-06T20:29:31Z
dc.date.issued2008-10-21
dc.identifier.urihttp://hdl.handle.net/1853/26276
dc.descriptionOliver Brand Associate Professor in the School of Electrical and Computer Engineering presented a lecture at the Nano@Tech Meeting on October 21, 2008 at 12:00 noon in room 102 of the Microelectronics Research Center.en
dc.descriptionRuntime: 58:15 minutes
dc.description.abstractThe presentation gives an introduction to resonant microsensors providing a frequency output signal. These sensors generally benefit from an excellent frequency resolution, which is ideally limited only by the length of the counting period and the short-term frequency stability of the microstructure's resonance frequency. Device-level and system-level approaches to generate a measurand-dependent frequency signal are discussed and concepts to improve Q-factor, short-term frequency stability and ultimately sensor resolution are highlighted. Furthermore, the presentation discusses frequency drift challenges and introduces methods for drift compensation. The above concepts and approaches are illustrated using two resonant microsensor examples: (i) a mass-sensitive microsensor platform for gas- and liquid-phase chemical sensing based on disktype silicon microstructures and (ii) a cantilever-based resonant magnetic microsensor with a resolution suitable for Earth field applications.en
dc.format.extent58:15 minutes
dc.language.isoen_USen
dc.publisherGeorgia Institute of Technologyen
dc.subjectNanotechnologyen
dc.subjectSensor
dc.subjectMEMS
dc.titleSilicon-Based Resonant Microsensorsen
dc.typeLectureen
dc.typeVideo
dc.contributor.corporatenameGeorgia Institute of Technology. School of Electrical and Computer Engineering


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