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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Georgia Tech Theses and Dissertations
Georgia Tech Theses and Dissertations
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Anisotropic low-energy electron-enhanced etching of semiconductors in DC plasma
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steiner_pinckney_a_199308_ms_369984.pdf (1.854Mb)
Date
1993-08
Author
Steiner, Pinckney Alston, IV
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URI
http://hdl.handle.net/1853/27060
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Georgia Tech Theses and Dissertations
[23403]
School of Chemistry and Biochemistry Theses and Dissertations
[1509]
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