A Novel Nanocomposite with Photo-Polymerization for Wafer Level Application
Wong, C. P.
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A novel nanocomposite photo-curable material which can act both as a photoresist and a stress redistribution layer applied on the wafer level was synthesized and studied. In the experiments, 20-nm silica fillers were modified by a silane coupling agent through a hydrolysis and condensation reaction and then incorporated into the epoxy matrix. A photo-sensitive initiator was added into the formulation which can release cations after ultraviolet exposure and initiate the epoxy crosslinking reaction. The photo-crosslinking reaction of the epoxy made it a negative tone photoresist. The curing reaction of the nanocomposites was monitored by a differential scanning calorimeter with the photo-calorimetric accessory. The thermal mechanical properties of photo-cured nanocomposites thin film were also measured. It was found that the moduli change of the nanocomposites as the filler loading increasing did not follow the Mori–Tanaka model, which indicated that the nanocomposite was not a simple two-phase structure as the composite with micron size filler. The addition of nano-sized silica fillers reduced the thermal expansion and improved the stiffness of the epoxy, with only a minimal effect on the optical transparency of the epoxy, which facilitated the complete photo reaction in the epoxy.