A Novel Fabrication Method for Producing Arrays of Nanopores in Ultra-thin Membranes
Ahmadi, Amir G.
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Functional nanopores are of great interest to sensing applications in the scientific community A novel method is demonstrated here for producing arrays of nanopores of size 10-100 nm on silicon wafers with high yield (~900 per wafer) and reproducibility. The method combines electron beam lithography (EBL) and atomic layer deposition (ALD) and allows the size of the pores to be fine tuned to nanometer resolution.
- Nano@Tech Lecture Series