• Login
    View Item 
    •   SMARTech Home
    • College of Engineering (CoE)
    • School of Materials Science and Engineering (MSE)
    • Center for Nanoscience and Nanotechnology
    • Center for Nanoscience and Nanotechnology Publications
    • View Item
    •   SMARTech Home
    • College of Engineering (CoE)
    • School of Materials Science and Engineering (MSE)
    • Center for Nanoscience and Nanotechnology
    • Center for Nanoscience and Nanotechnology Publications
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Growth of Epitaxial BaTiO₃Thin Films at 600°C by Metalorganic Chemical Vapor Deposition

    Thumbnail
    View/Open
    1995_mrs_00099.pdf (1.668Mb)
    Date
    1995
    Author
    Kaiser, D. L.
    Vaudin, M. D.
    Rotter, L. D.
    Wang, Z. L. (Zhong Lin)
    Cline, J. P.
    Hwang, C. S.
    Marinenko, R. B.
    Gillen, J. G.
    Metadata
    Show full item record
    Abstract
    Metalorganic chemical vapor deposition (MOCVD) was used to deposit epitaxial BaTiO₃3 thin films on (100) MgO substrates at 600°C. The metalorganic precursors employed in the deposition experiments were hydrated Ba(thd)2 (thd = CIIH190 2) and titanium isopropoxide. The films were analyzed by means of transmittance spectroscopy, wavelength dispersive x-ray spectrometry, secondary ion mass spectrometry depth profiling, x-ray diffraction, high resolution transmission electron microscopy, selected area electron diffraction, nanoscale energy dispersive x-ray spectrometry and second harmonic generation measurements. There was no evidence for interdiffusion between the film and substrate. The x-ray and electron diffraction studies showed that the films were oriented with the a-axis normal to the substrate surface, whereas second harmonic generation measurements showed that the films had some c-axis character.
    URI
    http://hdl.handle.net/1853/36488
    Collections
    • Center for Nanoscience and Nanotechnology Publications [105]

    Browse

    All of SMARTechCommunities & CollectionsDatesAuthorsTitlesSubjectsTypesThis CollectionDatesAuthorsTitlesSubjectsTypes

    My SMARTech

    Login

    Statistics

    View Usage StatisticsView Google Analytics Statistics
    facebook instagram twitter youtube
    • My Account
    • Contact us
    • Directory
    • Campus Map
    • Support/Give
    • Library Accessibility
      • About SMARTech
      • SMARTech Terms of Use
    Georgia Tech Library266 4th Street NW, Atlanta, GA 30332
    404.894.4500
    • Emergency Information
    • Legal and Privacy Information
    • Human Trafficking Notice
    • Accessibility
    • Accountability
    • Accreditation
    • Employment
    © 2020 Georgia Institute of Technology