High quality integrated silicon nitride nanophotonic structures for visible light applications
Shah Hosseini, Ehsan
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High quality nanophotonic structures fabricated on silicon nitride substrates and operating in the visible range of the spectrum are investigated. As most biological sensing applications, such as Raman and fluorescence sensing, require visible light pumping and analysis, extending the nanophotonics concepts to the visible range is essential. Traditionally, CMOS compatible processes are used to make compact silicon nanophotonics structures. While the high index contrast of silicon on insulator (SOI) wafers offer a high integration capability, the high absorption loss of silicon renders it unusable in the visible range. In this research high quality factor microdisk and photonic crystal resonators and high resolution arrayed waveguide grating and superprism spectrometers are fabricated and characterized in the visible range and integrated with fluidic structures and their application in biosensing and athermal operations is investigated.