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dc.contributor.authorPant, Bhaskaren_US
dc.date.accessioned2011-09-22T17:50:43Z
dc.date.available2011-09-22T17:50:43Z
dc.date.issued2010-07-02en_US
dc.identifier.urihttp://hdl.handle.net/1853/41174
dc.description.abstractNanotechnology offers great promise for the development of nanodevices. Hence it becomes important to study the mechanical behavior of nanostructures for their use in such systems. MEMS (Micro ElectroMechanical Systems) provide an effective and precise method for testing nanostructures. Consequently this study focuses on the development of a MEMS thermal nanotensile tester to investigate the mechanical behavior of one-dimensional nanostructures. Extensive characterization of these MEMS devices (structural, electrical and thermal behavior) was performed using experimental as well as finite element methods. Tensile testing of nanostructures requires manipulation of individual nanostructures on the MEMS device. The study involves the development of an efficient methodology for the manipulation of nanowires and nanobeams for nanoscale testing. Furthermore, two different sensing schemes for the developed devices, namely capacitive and resistive, have been extensively investigated and the advantages and various issues related to both have been discussed. Nanocrystalline (nc) Ni nanobeams (typical dimensions of 500 nm x 200 nm x 20 µm) have been tested to failure using the MEMS devices. Improvements in the design for the MEMS nanotensile tester have been suggested to significantly enhance the device performance and to resolve the various issues involved with nano scale tests. Differential capacitive sensing for stress-strain measurements has been suggested to improve the accuracy of strain measurements.en_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectPlastic deformationen_US
dc.subjectMEMS thermal nanotensile testeren_US
dc.subjectSub-diffraction limit optical measurementsen_US
dc.subjectFinite Elementen_US
dc.subjectCapacitive sensingen_US
dc.subjectDevice characterizationen_US
dc.subjectNanowire manipulationen_US
dc.subjectExperimental nanomechanicsen_US
dc.subject1D nanostructuresen_US
dc.subjectNanoscale failureen_US
dc.subject.lcshNanostructured materials Mechanical properties
dc.subject.lcshMicroelectromechanical systems
dc.titleExperimental nanomechanics of 1D nanostructuresen_US
dc.typeThesisen_US
dc.description.degreeM.S.en_US
dc.contributor.departmentMechanical Engineeringen_US
dc.description.advisorCommittee Chair: Pierron, Olivier; Committee Member: Gall, Ken; Committee Member: Zhu, Tingen_US


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