Materials Characterization Techniques at the NRC

Abstract

When building up multiple layers of materials in fabricating CMOS, MEMS, optics, SAW and other nano and micro scale devices, understanding the material composition and properties is very important. The final operation of the devices greatly depends on the properties of the materials used in the device, as well as the interfacial interaction between layers of materials. Within the NRC exist a plethora of materials characterization techniques for both structural and chemical analysis. This talk will serve as a "Capability Passdown" to the NRC user base, as well as an explanation of how each technique works, and what information can be obtained from the available processes.