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Development of PECVD (SiCxNy) films with a novel silane free technology ....
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108694_Sixtron_Final_Report_2010.pdf (263.0Kb)
Date
2010-12-24
Author
Rohatgi, Ajeet
Kang, Moon Hee
Ebong, Abasifreke
Rounsaville, Brian
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URI
http://hdl.handle.net/1853/42317
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Office of Sponsored Programs Research Reports
[6426]
School of Electrical and Computer Engineering OSP Research Reports
[414]
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