Browsing Center for Organic Photonics and Electronics (COPE) by Subject "Aggregation"

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Mesoscale kinetic Monte Carlo simulations of molecular resists: effects of photoacid homogeneity on resolution, line-edge roughness, and sensitivity

Lawson, Richard A.; Henderson, Clifford L. (Georgia Institute of TechnologySociety of Photo-optical Instrumentation Engineers (SPIE), 2010-01)

A 2-D kinetic Monte Carlo mesoscale model of molecular resists is developed to probe the effects of photoacid (PAG) homogeneity, specifically PAG aggregation behavior, on the resolution, sensitivity, and line-edge roughness ...