• Direct photopatterning of metal oxide structures using photosensitive metallorganics 

      Barstow, S.J.; Jeyakumar, A.; Roman, P.J.; Henderson, Clifford L. (Georgia Institute of TechnologyElectrochemical Society, 2004)
      A novel process employing photosensitive metallorganic precursor materials is used to pattern thin-film mixed-metal oxide structures. In this process a photosensitive metallorganic precursor is coated onto a silicon substrate ...