Browsing Center for Organic Photonics and Electronics (COPE) by Subject "Ferroelectric thin films"
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Direct photopatterning of metal oxide structures using photosensitive metallorganics
(Georgia Institute of TechnologyElectrochemical Society, 2004)A novel process employing photosensitive metallorganic precursor materials is used to pattern thin-film mixed-metal oxide structures. In this process a photosensitive metallorganic precursor is coated onto a silicon substrate ...