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Conditions for primitive-lattice-vector-direction equal contrasts in four-beam-interference lithography
(Georgia Institute of Technology, 2009-08)
Four distinct conditions for primitive-lattice-vector-direction equal contrasts in four-beam interference are introduced and described. By maximizing the absolute contrast subject to an equal contrast condition, lithographically ...
Three-beam-interference lithography: contrast and crystallography
(Georgia Institute of Technology, 2008-06)
Specific configurations of three linearly polarized, monochromatic plane waves have previously been shown to be capable of producing interference patterns exhibiting symmetry inherent in 5 of the 17 plane groups. Starting ...