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Improvement of thermal properties of ultra-high Q silicon microdisk resonators
(Georgia Institute of Technology, 2007-12)
We present a detailed study of the thermal properties of ultra-high quality factor (Q) microdisk resonators on silicon-on-insulator (SOI) platforms. We show that by preserving the buried oxide layer underneath the Si ...
Ultra-high Q planar silicon microdisk resonators for chip-scale silicon photonics
(Georgia Institute of Technology, 2007-04)
We report the fabrication and experimental characterization of an ultra-high Q microdisk resonator in a silicon-on-insulator (SOI) platform. We examine the role of the substrate in the performance of such microdisk resonators. ...