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Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths
(Georgia Institute of Technology, 2010-02)
High quality (Q ≈ 6 × 10⁵) microdisk resonators are demonstrated in a Si₃N₄ on SiO₂platform at 652–660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial ...