• Nonionic photoacid generator behavior under high-energy exposure sources 

      Lawson, Richard A.; Noga, David E.; Tolbert, Laren M.; Henderson, Clifford L. (Georgia Institute of TechnologySociety of Photo-optical Instrumentation Engineers (SPIE), 2009-10)
      A series of nonionic photoacid generators (PAGs) are synthesized and their acid generation efficiency measured under deep ultraviolet (DUV) and electron beam exposures. The acid generation efficiency is determined with an ...