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    Thermal conduction from microcantilever heaters in partial vacuum

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    COPE_028.pdf (832.7Kb)
    Date
    2007-01-01
    Author
    Lee, Jung Chul
    Wright, Tanya L.
    Abel, Mark R.
    Sunden, Erik Oscar
    Marchenkov, Alexei
    Graham, Samuel
    King, William P.
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    Abstract
    This paper reports the thermal and electrical characteristics of a heated microcantilever in air and helium over a wide range of pressures. The cantilever heater size modulates thermal conductance between the cantilever and its gaseous surroundings; and the Knudsen number, Kn characterizes this thermal conductance. When Kn<1, thermal transport from the cantilever heater depends on gas pressure, and when Kn>1, thermal transport from the cantilever heater remains constant. This measurement of thermal conductance around Kn = 1 could aid the design and analysis of Pirani sensors and other microscale thermal sensors and actuators.
    URI
    http://hdl.handle.net/1853/45607
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