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dc.contributor.authorLee, Jung Chulen_US
dc.contributor.authorWright, Tanya L.en_US
dc.contributor.authorAbel, Mark R.en_US
dc.contributor.authorSunden, Erik Oscaren_US
dc.contributor.authorMarchenkov, Alexeien_US
dc.contributor.authorGraham, Samuelen_US
dc.contributor.authorKing, William P.en_US
dc.date.accessioned2012-12-20T19:26:21Z
dc.date.available2012-12-20T19:26:21Z
dc.date.issued2007-01-01
dc.identifier.citationLee, Jungchul and Wright, Tanya L. and Abel, Mark R. and Sunden, Erik O. and Marchenkov, Alexei and Graham, Samuel and King, William P., "Thermal conduction from microcantilever heaters in partial vacuum," Journal of Applied Physics, 101, 1, (January 1 2007)en_US
dc.identifier.issn1089-7550
dc.identifier.urihttp://hdl.handle.net/1853/45607
dc.description© 2007 American Institute of Physics. The electronic version of this article is the complete one and can be found at: http://dx.doi.org/10.1063/1.2403862en_US
dc.descriptionDOI: 10.1063/1.2939097en_US
dc.description.abstractThis paper reports the thermal and electrical characteristics of a heated microcantilever in air and helium over a wide range of pressures. The cantilever heater size modulates thermal conductance between the cantilever and its gaseous surroundings; and the Knudsen number, Kn characterizes this thermal conductance. When Kn<1, thermal transport from the cantilever heater depends on gas pressure, and when Kn>1, thermal transport from the cantilever heater remains constant. This measurement of thermal conductance around Kn = 1 could aid the design and analysis of Pirani sensors and other microscale thermal sensors and actuators.en_US
dc.language.isoen_USen_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectCantileversen_US
dc.subjectMicromechanical devicesen_US
dc.subjectHeat conductionen_US
dc.subjectKnudsen flowen_US
dc.titleThermal conduction from microcantilever heaters in partial vacuumen_US
dc.typeArticleen_US
dc.contributor.corporatenameGeorgia Institute of Technology. Center for Organic Photonics and Electronicsen_US
dc.contributor.corporatenameGeorgia Institute of Technology. School of Mechanical Engineeringen_US
dc.contributor.corporatenameGeorgia Institute of Technology. School of Physicsen_US
dc.publisher.originalAmerican Institute of Physicsen_US
dc.identifier.doi10.1063/1.2403862


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