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dc.contributor.authorMaikisch, Jonathan Stephenen_US
dc.date.accessioned2013-01-17T21:53:40Z
dc.date.available2013-01-17T21:53:40Z
dc.date.issued2012-11-06en_US
dc.identifier.urihttp://hdl.handle.net/1853/45882
dc.description.abstractThe primary objective of the presented research is to develop a class of integrated compact silicon diffractive sensors (CSDS) based on in-plane diffraction gratings. This class of sensors uses a silicon-on-insulator (SOI) substrate to limit costs, exploit established fabrication processes, enable integration of supporting electronics, and use the well-understood telecommunications wavelength of 1.55µm. Sensing is achieved by combining constant-diffraction-efficiency and highly-angularly-selective in-plane resonance-domain diffraction gratings. Detection is based on the diffraction efficiency of the highly angularly selective grating. In this research, the design processes for the constant-diffraction-efficiency and the highly angularly selective gratings are detailed. Grating designs are optimized with rigorous coupled-wave analysis (RCWA) and simulated with finite-difference time-domain (FDTD) analysis. Fabrication results are presented for the CSDS gratings. An inductively coupled plasma (ICP) Bosch etch process enables grating fabrication to within one percent of designed values with nearly vertical sidewalls. Experimental results are presented for individual CSDS gratings, the prototype sensor, and a prototype linear sensor array. The results agree well with simulation. The linear sensor array prototype demonstrates the intrinsic splitting mechanism and forms the basis of a 2-D sensor array. Finally, a toluene sensor was functionally demonstrated. The proof-of-concept device includes a polymer immobilization layer and microfluidic delivery of toluene. Toluene concentrations as low as 100ppm are measured, corresponding to a refractive index change of 3x10⁻⁴ RIU.en_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectIntegrated diffraction gratingen_US
dc.subjectFinite-difference time-domain simulationen_US
dc.subjectRigorous coupled-wave analysisen_US
dc.subject.lcshDiffraction gratings
dc.subject.lcshMicroelectronics
dc.subject.lcshMicrotechnology
dc.titleCompact silicon diffractive sensor: design, fabrication, and functional demonstrationen_US
dc.typeDissertationen_US
dc.description.degreePhDen_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
dc.description.advisorCommittee Chair: Gaylord, Thomas; Committee Member: Bakir, Muhannad; Committee Member: Chatterjee, Abhijit; Committee Member: Davis, Donald; Committee Member: First, Phillipen_US


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