Three-dimensional Silicon Micromachining for Hemispherical Polysilicon Micro-shell Resonators with Capacitive Transducers
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This presentation will discuss the fabrication, rudimentary testing results, and applications of the polysilicon micro-shell resonator integrated with capacitive transducers. The capacitive electrodes are conveniently formed by doping. The entire device structure is designed with a goal of self-alignment so that it can be used as a high-performance hemispherical resonator gyroscope.
- Nano@Tech Lecture Series