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dc.contributor.authorBerger, C.M.en_US
dc.contributor.authorByers, J.D.en_US
dc.contributor.authorHenderson, Clifford L.en_US
dc.date.accessioned2013-06-27T19:45:01Z
dc.date.available2013-06-27T19:45:01Z
dc.date.issued2004-02
dc.identifier.citationBerger, C.M.; Byers, J.D. and Henderson, Clifford L., "Using interdigitated electrodes for measuring photoacid generator kinetics in chemically amplified resists," Journal of the Electrochemical Society, Vo. 151, no.2, G119-G130 (February 2004).en_US
dc.identifier.issn0013-4651 (print) 1945-7111 (online)
dc.identifier.urihttp://hdl.handle.net/1853/48096
dc.description© 2004 The Electrochemical Society, Inc. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS).en_US
dc.description.abstractIn this work, the feasibility of using interdigitated electrodes to measure the kinetics of photoacid generation in a resist film has been examined. Interdigitated electrodes provide a quick, noninvasive, nondestructive alternative to traditional Dill C measurement techniques and unlike traditional techniques is easily performed in a wafer fab environment. The initial results indicate that the interdigitated electrodes ~IDEs! used in this work are capable of both detecting the small quantities of acid generated by photoacid generators ~PAGs! at loadings typical of those found in chemically amplified resists and quantifying the amount of acid generated during exposure. In addition, a linear relationship has been observed between measured IDE capacitance and both PAG and photoacid content. This relationship has been utilized to determine the Dill C parameter from the measured IDE capacitance response vs. exposure dose for films consisting of triphenylsulfonium triflate ~TPS-Tf! in a poly~hydroxystyrene! ~PHOST! Matrix. A Dill C value of 0.0445 cm2/mJ was measured for TPS-Tf in PHOST, which is in agreement with literature values for similar PAG-polymer systems.en_US
dc.language.isoen_USen_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectCapacitanceen_US
dc.subjectOrganic compoundsen_US
dc.subjectResistsen_US
dc.titleUsing interdigitated electrodes for measuring photoacid generator kinetics in chemically amplified resistsen_US
dc.typeArticleen_US
dc.contributor.corporatenameGeorgia Institute of Technology. Center for Organic Photonics and Electronicsen_US
dc.publisher.originalElectrochemical Societyen_US
dc.identifier.doi10.1149/1.1638387en_US


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