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dc.contributor.authorWu, X. Q.en_US
dc.contributor.authorReed, H. A.en_US
dc.contributor.authorWang, Y.en_US
dc.contributor.authorRhodes, L. F.en_US
dc.contributor.authorElce, E.en_US
dc.contributor.authorRavikiran, R.en_US
dc.contributor.authorShick, R. A.en_US
dc.contributor.authorHenderson, Clifford L.en_US
dc.contributor.authorAllen, S. A. B.en_US
dc.contributor.authorKohl, P. A.en_US
dc.date.accessioned2013-06-27T19:45:01Z
dc.date.available2013-06-27T19:45:01Z
dc.date.issued2003-09
dc.identifier.citationWu, X. Q.; Reed, H. A.; Wang, Y.; Rhodes, L. F.; Elce, E.; Ravikiran, R.; Shick, R. A.; Henderson, Clifford L.; Allen, S. A. B. and Kohl, P. A., "Fabrication of microchannels using polynorbornene photosensitive sacrificial materials," Journal of the Electrochemical Society, Vol. 150, no.9, H205-H213 (September 2003).en_US
dc.identifier.issn0013-4651 (print) 1945-7111 (online)
dc.identifier.urihttp://hdl.handle.net/1853/48097
dc.description© 2003 The Electrochemical Society, Inc. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS).en_US
dc.description.abstractA processing method has been demonstrated for the fabrication of microchannels using photosensitive polynorbornene copolymer based sacrificial materials. The channel geometric patterns of sacrificial polymer were made via photolithography. The sacrificial polymer patterns were encapsulated with a dielectric medium and then thermally decomposed to form air channels. For the thermal decomposition of sacrificial polymer, the heating program was determined on the basis of the kinetic model obtained from thermogravimetric analysis to maintain the decomposition at a constant rate. The results indicate that a properly selected heating program can avoid the deformation in the channel structure; at the same conditions, a large-size channel is more easily deformed than a small one. The tapered-structure microchannels were also produced using a gray-scale mask. The result shows that a suitably low contrast for the photosensitive sacrificial material can lead to smooth and tapered microchannels.en_US
dc.language.isoen_USen_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectMicrofluidicsen_US
dc.subjectPhotolithographyen_US
dc.subjectPolymer blends|Thermal analysisen_US
dc.titleFabrication of microchannels using polynorbornene photosensitive sacrificial materialsen_US
dc.typeArticleen_US
dc.contributor.corporatenameGeorgia Institute of Technology. Center for Organic Photonics and Electronicsen_US
dc.publisher.originalElectrochemical Societyen_US
dc.identifier.doi10.1149/1.1596955en_US


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