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dc.contributor.authorSingh, Lovejeeten_US
dc.date.accessioned2005-03-01T19:28:32Z
dc.date.available2005-03-01T19:28:32Z
dc.date.issued2004-10-20en_US
dc.identifier.urihttp://hdl.handle.net/1853/4822
dc.description.abstractThe behavior of polymeric systems confined into thin films is a situation that has numerous practical consequences. One particular application in which the properties of thin polymer films is becoming crucially important is in the design, formulation, and processing of photoresists for semiconductor microlithography. As devices continue to be scaled down into the nano-regime, the microelectronics industry will ultimately rely upon a molecular understanding of materials for process development. The majority of these devices are now confined in planar geometries; thus, thin films have played an ever-increasing role in manufacturing of modern electronic devices. This movement towards thinner resist films creates larger surface to volume ratios, and hence thin films can exhibit thermodynamic, structural, and dynamic properties that are different from those of the bulk material. It is thus extremely important to understand the properties of polymers when confined in such geometries for various applications including resists for lithographic patterning. In present work, the influence of a variety of factors including film thickness, molecular weight, and substrate interactions on the polymer thin film physical properties such as the glass transition temperature, coefficient of thermal expansion, dissolution rate, and diffusion coefficient was studied in detail using a combination of experimental characterization and molecular modeling simulation techniques.en_US
dc.format.extent1095675 bytes
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherGeorgia Institute of Technologyen_US
dc.subjectDiffusion coefficienten_US
dc.subjectGlass transition temperature
dc.subjectPolymer thin films
dc.subject.lcshThin filmsen_US
dc.subject.lcshPolymersen_US
dc.subject.lcshGlass transition temperatureen_US
dc.subject.lcshDiffusionen_US
dc.titleEffect of Nanoscale Confinement on the Physical Properties of Polymer Thin Filmsen_US
dc.typeDissertationen_US
dc.description.degreePh.D.en_US
dc.contributor.departmentChemical Engineeringen_US
dc.description.advisorCommittee Chair: Dr. Clifford L. Henderson; Committee Co-Chair: Dr. Peter J. Ludovice; Committee Member: Dr. Carson J. Meredith; Committee Member: Dr. Laren Tolbert; Committee Member: Dr. William J. Korosen_US


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