Show simple item record

dc.contributor.advisorHenderson, Clifford L.
dc.contributor.advisorTolbert, Laren M.
dc.contributor.authorCheshmehkani, Ameneh
dc.date.accessioned2014-01-13T16:22:07Z
dc.date.available2014-01-13T16:22:07Z
dc.date.created2013-12
dc.date.issued2013-08-28
dc.date.submittedDecember 2013
dc.identifier.urihttp://hdl.handle.net/1853/50286
dc.description.abstractIn this thesis, different approaches in synthesizing molecular resist are examined, and structure-property relations for the molecular resist properties are studied. This allows for design of resists that could be studied further as either negative or positive tone resists in photolithography. A series of compounds having different number of acrylate moiety, and different backbones were investigated for photoresist application. Thermal curing of acrylate compounds in organic solvent was also examined. Film shrinkage, as well as auto-polymerization was observed for these compounds that make them unsuitable as photoresist material. Furthermore, calix[4]resorcinarenes (C4MR) was chosen as backbone, and the functional groups was selected as oxetane and epoxy. Full functionalized C4MR compounds with oxetane, epoxy and allyl were synthesized. Variable-temperature NMR of C4MR-8Allyl was studied in order to get a better understanding of the structure’s conformers. Energy barrier of exchange (ΔG#) was determined from coalescence temperatures, and was 57.4 KJ/mol for aromatic and vinyl hydrogens and 62.1 KJ/mol for allylic hydrogens.
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherGeorgia Institute of Technology
dc.subjectPhotoresist
dc.subjectLithography
dc.subjectCalixarene
dc.subjectOxetane
dc.subjectEpoxide
dc.subjectAcrylate
dc.subject.lcshPhotoresists
dc.subject.lcshMasks (Electronics)
dc.subject.lcshPhotolithography
dc.titleDesign and synthesis of molecular resists for high resolution patterning performance
dc.typeThesis
dc.description.degreeM.S.
dc.contributor.departmentChemistry and Biochemistry
thesis.degree.levelMasters
dc.contributor.committeeMemberReynolds, John R.
dc.contributor.committeeMemberHess, Dennis W.
dc.contributor.committeeMemberCollard, David
dc.date.updated2014-01-13T16:22:07Z


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record