Recent Submissions

  • Positive Tone, Polynorbornene Dielectric Crosslinking 

    Schwartz, Jared M.; Mueller, Brennen K.; Elce, Edmund; Pritchard, Zachary D.; Li, Helen W.; Grillo, Angelica M.; Lee, Sang Y.; Kohl, Paul A. (Georgia Institute of Technology, 2014-05)
    The processing and properties of a positive-tone, aqueous develop, epoxy crosslinked permanent dielectric based on a polynorbornene (PNB) backbone and bis(diazonaphthoquinone) (DNQ) photosensitive compound were investigated. ...
  • Chemically Amplified, Positive Tone, Polynorbornene Dielectric for Microelectronics Packaging 

    Mueller, Brennen K.; Schwartz, Jared M.; Sutlief, Alexandra E.; Bell, William K.; Hayes, Colin O.; Elce, Edmund; Willson, C. Grant; Kohl, Paul A. (Georgia Institute of Technology, 2014-05)
    A low permittivity, positive tone, polynorbornene dielectric has been developed that exhibits excellent lithographic and electrical properties. The polymer resin is a random copolymer of a norbornene hexafluoroalcohol ...
  • Improved Mechanical Properties of Chemically Amplified, Positive Tone, Polynorbornene Dielectric 

    Schwartz, Jared M.; Sutlief, Alexandra E.; Kohl, Paul A.; Mueller, Brennen K. (Georgia Institute of Technology, 2014-12)
    The mechanical properties of an aqueous developed, chemically amplified, polynorbornene-based permanent dielectric have been investigated. The previously reported hexafluoroisopropanol norbornene and tert-butyl ester ...