• Chemically Amplified, Positive Tone, Polynorbornene Dielectric for Microelectronics Packaging 

      Mueller, Brennen K.; Schwartz, Jared M.; Sutlief, Alexandra E.; Bell, William K.; Hayes, Colin O.; Elce, Edmund; Willson, C. Grant; Kohl, Paul A. (Georgia Institute of Technology, 2014-05)
      A low permittivity, positive tone, polynorbornene dielectric has been developed that exhibits excellent lithographic and electrical properties. The polymer resin is a random copolymer of a norbornene hexafluoroalcohol ...