Fabrication of nano-laminated soft magnetic metallic alloys through multilayer electrodeposition: application to high-frequency and high-flux power conversion
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In this research, in order to realize such nanolaminated magnetic cores for high frequency and high power conversion, the following key tasks have been accomplished: 1) electrodeposition of metallic alloy materials such as NiFe, CoNiFe, and anisotropic CoNiFe; 2) development of new fabrication technologies to realize nanolaminated cores based on metallic alloy electrodeposition; 3) reliable characterization of the structural, magnetic, and electrical properties of the nanolaminated metallic alloy cores; 4) development of microfabricated inductor windings to integrate the nanolaminated cores; 5) demonstration of high-frequency and high-flux ultracompact DC-DC power conversion using inductors integrated with nanolaminated metallic alloy cores. By achieving these tasks, nanolaminated cores comprising tens to hundreds of layers of metallic alloy films (Ni80Fe20 and Co44Ni37Fe19) has been developed. The fabricated nanolaminated core consists of sufficiently thin nanolaminations (100 – 1000 nm) that can suppress eddy currents in the MHz range, while simultaneously achieving the overall magnetic thickness (35 – 2000 µm) such that substantial power can be handled. The nanolaminated metallic alloy cores were further integrated into microfabricated inductors using CMOS-compatible fabrication processes. Finally, an ultracompact DC-DC buck converter with the nanolaminated metallic alloy cores has been developed on PCB having footprint of 14 × 7.1 mm2. The input voltage of the converter varied from 30 to 70 V and the output voltage was fixed at 20 V. The converter operated with output power of approximately 11 W and the switching frequencies of 0.7 – 1.4 MHz, demonstrating conversion efficiency of 94.2% at 30 V input and 80.8% at 60 V input.