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dc.contributor.advisorLipkin, Harvey
dc.contributor.authorBabayan, Elaina Noelle
dc.date.accessioned2016-01-07T17:22:19Z
dc.date.available2016-01-07T17:22:19Z
dc.date.created2014-12
dc.date.issued2014-12-05
dc.date.submittedDecember 2014
dc.identifier.urihttp://hdl.handle.net/1853/54313
dc.description.abstractWafer handling robotics are critical in semiconductor manufacturing to enable tight control of temperature, humidity, and particle contamination during processing. Closed-loop dynamic modeling during the robot design process ensures designs meet throughput and stability specifications prior to prototype hardware purchase. Dynamic models are also used in model-based control to improve performance. This thesis describes the generation and mathematical verification of a dynamic model for a three degrees-of-freedom wafer handling mechanism with one linear and two rotary axes. The dynamic plant model is integrated with motion and motor controller models, and the closed-loop performance is compared with experimental data. Models with rigid and flexible connections are compared, and the flexible connection models are shown to overall agree better with a measured step response. The simulation time increase from the addition of flexible connections can be minimized by modeling only the component stiffnesses that impact the closed-loop mechanism response. A method for selecting which elements to include based on controller bandwidth is presented and shown to significantly improve simulation times with minimal impact on model predictive performance.
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherGeorgia Institute of Technology
dc.subjectLumped-parameter modeling
dc.subjectRobotics
dc.subjectWafer handling
dc.subjectClosed-loop simulation
dc.titleHigh fidelity control and simulation of a three degrees-of-freedom wafer handling robot
dc.typeThesis
dc.description.degreeM.S.
dc.contributor.departmentMechanical Engineering
thesis.degree.levelMasters
dc.contributor.committeeMemberParedis, Chris
dc.contributor.committeeMemberMitchell, Robert
dc.date.updated2016-01-07T17:22:19Z


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