Advanced interface systems for readout, control, and self-calibration of MEMS resonant gyroscopes
Norouz Pour Shirazi, Arashk
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MEMS gyroscopes have become an essential component in consumer, industrial and automotive applications, owing to their small form factor and low production cost. However, their poor stability, also known as drift, has hindered their penetration into high-end tactical and navigation applications, where highly stable bias and scale factor are required over long period of time to avoid significant positioning error. Improving the long-term stability of MEMS gyroscopes has created new challenges in both the physical sensor design and fabrication, as well as the system architecture used for interfacing with the physical sensor. The objective of this research is to develop interface circuits and systems for in-situ control and self-calibration of MEMS resonators and resonant gyroscopes to enhance the stability of bias and scale factor without the need for any mechanical rotary stage, or expensive bulky lab characterization equipment. The self-calibration techniques developed in this work provide 1-2 orders of magnitude improvement in the drift of bias and scale factor of a resonant gyroscope over temperature and time.