Optical interferometric determination of in-plane residual stresses in SiO₂ films on silicon substrates

View/Open

e-25-564_457618.pdf (3.955Mb)

Date

1994-04

Author

Danyluk, Steven S.

Ghaffari, Kasey

Metadata

Show full item record

URI

http://hdl.handle.net/1853/55095

Collections

Office of Sponsored Programs Research Reports [6139]