High-Purity Water System Design; Unit operations, Philosophies, Opertion and Startup Considerations
Abstract
Understanding the different high-purity water quality standards and their implications on water treatment system designs plays a critical role in the planning, development and operation of nanotechnology research and other semiconductor related facilities. Topics in first session; Understanding the critical questions that need to be asked and answered, Understanding the roles different unit operations have in the UPW process, Understanding the design philosophy employed in system design to achieve the UPW
quality required. Topics in second session; Understanding what it takes to properly install and startup
a UPW system, Understanding the operational and maintenance requirements, Understanding the
importance of monitoring. SECOND SESSION can be accessed at: http://hdl.handle.net/1853/56521