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    Microelectromechanical Resonators Having Piezoelectric Layers Therein That Support Actuation And Sensing Through A Longitudinal Piezoelectric Effect

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    8519598.pdf (858.3Kb)
    Date
    8/27/2013
    Author
    Ayazi, Farrokh
    Tabrizian, Roozbeh
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    Abstract
    Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a upper surface thereof, which is configured to support actuation and sensing through a transverse piezoelectric effect (e31), and a second piezoelectric layer on at least a portion of a first sidewall thereof, which is configured to support actuation and sensing through a longitudinal piezoelectric effect (e33), where e33 is greater than e31. These resonators may further include a first bottom electrode extending between the first piezoelectric layer and the upper surface of the resonator body and a second bottom electrode extending between the second piezoelectric layer and the first sidewall of the resonator body. These first and second bottom electrodes may be contiguous as a single bottom electrode and the first and second piezoelectric layers may be contiguous as a single piezoelectric layer.
    URI
    http://hdl.handle.net/1853/56798
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