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dc.date.accessioned2017-05-12T14:26:07Z
dc.date.available2017-05-12T14:26:07Z
dc.date.issued8/27/2013
dc.identifier.urihttp://hdl.handle.net/1853/56798
dc.description.abstractMicroelectromechanical resonators include a resonator body having a first piezoelectric layer on a upper surface thereof, which is configured to support actuation and sensing through a transverse piezoelectric effect (e31), and a second piezoelectric layer on at least a portion of a first sidewall thereof, which is configured to support actuation and sensing through a longitudinal piezoelectric effect (e33), where e33 is greater than e31. These resonators may further include a first bottom electrode extending between the first piezoelectric layer and the upper surface of the resonator body and a second bottom electrode extending between the second piezoelectric layer and the first sidewall of the resonator body. These first and second bottom electrodes may be contiguous as a single bottom electrode and the first and second piezoelectric layers may be contiguous as a single piezoelectric layer.
dc.titleMicroelectromechanical Resonators Having Piezoelectric Layers Therein That Support Actuation And Sensing Through A Longitudinal Piezoelectric Effect
dc.typePatent
dc.contributor.patentcreatorAyazi, Farrokh
dc.contributor.patentcreatorTabrizian, Roozbeh
dc.identifier.patentnumber8519598
dc.description.assigneeGeorgia Tech Research Corporation
dc.identifier.patentapplicationnumber13/175870
dc.date.filed7/3/2011
dc.identifier.uspc310/320
dc.identifier.cpcH03H9/2447
dc.identifier.cpcH01L41/0805
dc.identifier.cpcH03H2009/241


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