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    Bulk Acoustic Wave Accelerometers

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    8528404.pdf (743.1Kb)
    Date
    9/10/2013
    Author
    Ayazi, Farrokh
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    Abstract
    Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Kc of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.
    URI
    http://hdl.handle.net/1853/56801
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